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Advanced Energy
A global leader in innovative power and control technologies that drive high-growth, plasma thin-film and nontech manufacturing processes.
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直流電源
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直流脈衝產品套件

AE 的脈衝產品系列具有各種功能,能夠滿足您所有的困難和各式各樣的製程要求。這個靈活的直流脈衝附件系列提供 10-200kW 的功率以及 2-100kHz 的固定和可變頻率。這個系列的每一項產品在設計上均具有相當的特點,能夠針對反應和導電直流濺射提供經證實的優點。


優點 特性
  • 功能廣泛
  • 靈活的直流脈衝附件系列 
  • 通過允許在更大功率下運行,提高生產量 
  • 減少靶材污染
  • 提高 10-200kW 的功率 
  • 提供 2-100kHz 的固定和可變頻率 
  • 出色的電弧控制——在很多情況下,電弧完全被消除。 
  • 離子能量更高 
  • 更大功率運行 
  • 基板溫度更低 
  • 目標溫度更低 
  • 製程靈活性和寬容度 
  • 系統整合容易 
  • 雙陰極功能(Astral® 產品)


文獻下載

DC Pulsing Products: Proven Benefits for Reactive & Conductive Sputtering brochure
Guidelines for Using a Pulsar™ DC Pulsing Accessory with an SCR-Fired DC Power Supply (2007) application note
Pulsar High-Power DC Pulsing Accessory (2006) application note
Arc Handling in RF-Superimposed DC Processes (2006)application note
Increasing Production Output with Pulsed-DC Accessories (2006) white paper
Signal Integrity for Vacuum Processing Systems (2003) white paper

The Evolution of Power Delivery in Reactive Silicon Sputtering (1999) white paper
Effects of the Anode Configuration on Substrate Heating in Dual-Magnetron Sputtering (1999) white paper
Power Supplies for Pulsed Plasma Technologies: State-of-the-Art Outlook (2001) white paper
Enhanced Reactively Sputtered Al2O3 Deposition by Addition of Activated Reactive Oxygen (1999) white paper
Advances in Arc-Handling in Reactive and Other Difficult Processes (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Arcing Problems Encountered During Sputter Deposition of Aluminum (2000) white paper
Reactive Sputter Deposition of Aluminum Oxide Coatings, April 2004 magazine reprint
Pulsed-DC Reactive Sputtering of Dielectrics: Pulsing Parameter Effects, April 2000 magazine reprint
Fabs can ride through voltage sags with power-quality targets, July 2004, magazine reprint
Partial Pressure Control in Reactive Sputtering, June 2004 magazine reprint
An Economical Method for Process Control in Pulsed-DC Magnetron Reactive Sputtering, June 2003 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
AE Global Services data sheet

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