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Advanced Energy
A global leader in innovative power and control technologies that drive high-growth, plasma thin-film and nontech manufacturing processes.
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RF 電源系統
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Apex® RF電源系統

通用 Apex® 系列射頻電源和供電系統採用複雜的射頻轉換技術，在適合於反應室安裝的模組化設計中提供增大的產品和製程可靠性。Apex 平臺在針對半導體、平板顯示器或資料存儲製造以電漿為基礎的薄膜製程中表現優異。


優點 特性
  • 更高的功率密度 
  • 更好的製程靈活性 
  • 輸出量提高 
  • 持有成本降低 
  • 簡化製程工具整合 
  • 靈活的通信 
  • 簡化的設計 
  • 板上反應室安裝、板上框架安裝、支架安裝和鞋盒式 (shoebox) 選擇 
  • 寬頻控制回路和可選的高重複率脈衝 
  • 業界領先的電弧管理
  • 符合監管要求 


文獻下載

Apex® RF 電漿濺鍍電源供應器     English
Signal Integrity for Vacuum Processing Systems (2003) white paper
Advanced Energy RF Calibration Process (2002) white paper
The Evolution of RF Power Delivery in Plasma Processing (2001) white paper
Forward and Reflected Powers. What Do They Mean? (2001) white paper
Introducing Power Supplies and Plasma Systems (2001) white paper
Arcing Problems Encountered During Sputter Deposition of Aluminum (2000) white paper
Stabilizing RF Generator and Plasma Interactions, April 2004 magazine reprint
Fabs can ride through voltage sags with power-quality targets, July 2004 magazine reprint
Power Supplies Advance Beyond Volts and Amps, June 2003 magazine reprint
March 26, 2008 - Advances in Radio Frequency Plasma Power Delivery Systems presentation
RF Power Fundamentals Course data sheet
AE Global Services brochure

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