Aera® FC-D980 Digital Mass Flow brochureDigital Mass Flow Controllers (2005) white paperFundamentals of Mass Flow Control (2005) white paperRevised Conversion Factor (2002) white paperEffective Closed-Loop Control for Reactive Sputtering Using Two Reactive Gases, April 2004 magazine reprintMass Flow Control Fundamentals and Troubleshooting data sheetD-980 Digital Mass Flow Controller and Mass Flow Meter user manualBasic Product Information and Troubleshooting for Aera® MFCs and MFMsAE Global Services brochure